Os Corporation

By David Lee | May 6, 2026

By leveraging multi-channel heat source RTP and integrated thermal/plasma chamber technologies, Os Corporation targets a step-change improvement in atomic layer etching process rates.

Eunggoo Lee

Eunggoo Lee is the CEO of Os Corporation, which develops ALD, ALE, CVD equipment for semiconductors.

Eunggoo started his career as a process engineer, developing OLED manufacturing equipment. His expertise include process development, concept design, process testing, and manufacturing performance evaluation.

Eunggoo holds a Ph.D. in Materials Science and Engineering from Korea University.