Reno Subsystems

Reno Sub-Systems’ mission is to lead the semiconductor industry in developing radio frequency (RF) matching system/power generator and flow subsystem technologies to optimize process control for volume production. For 10 nm technology nodes and below, these products provide original equipment manufacturers (OEMs) differentiating performance on deposition and etch tools without requiring tool redesign. For device manufacturers, they provide an order-of-magnitude improvement in process control to enable manufacturing of leading-edge devices. Reno’s patented technologies enable the short process times necessary in plasma processes for both planar and 3D device architectures and facilitate “always on” plasma management, improving particle control, film properties, and cost efficiency.